超导数字电路技术在国际上已有近50年的发展历史。约20年前,日本和美国已经基本掌握了基于SFQ单元库的设计技术和LTS四层2微米Nb/AIOx/Nb工艺技术,集成度达到104JJs/cm2。近年,在美国超导计算机项目C3（Cryogenic Computing Complexity）的推动下,日本和美国分别开发了ADP2九层l微米Nb/AIOx/Nb工艺和MIT Lincoln Laboratory十层0.5微米Nb/AIOx/Nb工艺技术,并实现了多层PTL（Passive Transmission Line）超导传输线,集成度可达到l05JJs/cm2。到2020年,预计美国和日本的超导SFQ大规模集成电路的集成度将达到l06JJs1cm2。届时,64位超导sFQ微处理器的实现将成为可能。

 超导转变边缘探测器（TES）具有极高的灵敏度及能谱分辨率,在大赫兹与X射线波段宇宙学及天体物理观测研究中正发挥越来越重要的作用。得益于平面制备工艺及低噪声复用读出电路技术的发展,超导转变边缘探测器（TES）与传统的半导体Bolometer相比,容易实现大规模阵列。在量子信息等领域,超导TES探测器的高效率及光子数分辨本领则有独特优势。本报告将首先介绍超导TES探测器及读出电路的发展现状,然后重点介绍中科院紫金山天文台为南极5米太赫兹望远镜研制的超导TES探测器阵列最新结果,最后针对单光子探测讨论超导TES探测器的应用前景。

In this talk, I will focus on our two recent experiments. In the first one, we propose and experimentally demonstrate a unique two-fold quantum delayed-choice experiment where wave or particle nature of a superconducting interfering device can be post-selected twice after the interferometer. This experiment is enabled by a quantum which-path detector implemented through a superconducting cavity, showing an unprecedented controllability to test of wave-particle complementarity through the peculiar quantum delayed-choice measurements. In the second experiment, we demonstrate a new method to generate arbitrary Fock-state superpositions in a superconducting circuit. As examples, we generate high-fidelity phase eigenstates under various Hilbert-space dimensions and squeezed states, which are useful for quantum walk and high-precision measurements.