中国学科发展战略·微纳机电系统与微纳传感器技术----中国科学院学部学术引领专题

联合指导小组

组长：侯建国李静海

副组长：秦大河韩宇

成员：王恩哥朱道本傅伯杰陈宜瑜李树深杨卫高鸿钧王笃金苏荣辉王长锐邹立尧于晟董国轩陈拥军冯雪莲姚玉鹏王岐东张兆田杨列勋孙瑞娟

联合工作组

组长：苏荣辉于晟

成员：龚旭孙粒高阵雨李鹏飞钱莹洁薛准冯霞马新勇

编委会

组长：王曦

咨询专家（按姓氏汉语拼音排序）：

程建功方家熊何杰黄庆安金庆辉李昕欣潘庆陶虎吴一戎夏善红杨潇

编写人员（按姓氏汉语拼音排序）：

陈昌陈方陈滢程建功冯飞胡春瑞焦鼎李昕欣刘博毛红菊王家畴王靖王雪凤魏晓玲吴亚明武震宇许鹏程徐炜杨恒于海涛

习近平同志在2018年两院院士大会上的重要讲话中指出：“世界正在进入以信息产业为主导的经济发展时期。我们要把握数字化、网络化、智能化融合发展的契机，以信息化、智能化为杠杆培育新动能。”这一重要论述准确把握了当今世界信息技术的迅猛发展态势，为大力发展信息技术推动国家创新发展指明了方向。

传感器技术是信息源头获取技术中的重要手段，近期受到广泛的高度关注。根据当今各个行业对传感器体积缩小、功耗减少、价格降低和规模制造能力增强的迫切需求，微纳传感器越来越受到应用领域的欢迎。同时，实现微纳传感器批量制造的微纳机电系统 (micro/nano-electro-mechanical systems, MEMS/NEMS )技术也逐步成为使用最广泛的先进工艺技术手段之一。

本书对微纳机电系统与微纳传感器领域的主要技术进行了分类阐述，凝练了技术发展需要解决的科学问题，梳理了发展现状和趋势，讨论了发展方向和思路，从而有针对性地提出了发展的对策建议。本书将技术进展分析与我国的发展思路结合起来，在迎接科学技术发展挑战的同时，着重考虑我国国情和中长期战略发展规划，目的是让科学技术这个“第一生产力”最终落地到促进我国经济转型提升和社会全面发展的事业中。

本书的写作和编撰人员由传感技术联合国家重点实验室的研究人员组成，同时得到了该领域很多著名学者的指导和建议。本书的出版得到了中国科学院和国家自然科学基金委员会等部门的立项支持和悉心指导，也得到了科学出版社的大力支持。在本书即将付梓之际，谨向为本书出版付出心血的全体同志致以诚挚的敬意和衷心的感谢！

本书可作为国家相关部门制定相关科技发展规划的参考，也适合广大科技工作者及大学生、研究生和教师阅读。当然，微纳传感器种类很多，微纳制造技术也层出不穷，本书在有限篇幅内抓住一些技术关键点和应用较广泛的传感器进行论述，难免挂一漏万，希望广大读者提出宝贵的意见和建议。

王曦

2020年1月20日

总序

前言

摘要

Abstract

第一章微纳机电系统与微纳传感器的战略地位

第二章基于微纳机电系统的光学传感器及光电子芯片技术

第一节光学MEMS技术

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

第二节集成生物光电子芯片技术

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

参考文献

第三章基于微纳机电系统的谱学分析传感器技术

第一节概述

一、谱学分析传感器的定义与内涵

二、谱学分析传感器的发展动力

第二节发展现状与发展态势

一、谱学分析传感器的发展现状

二、谱学分析传感器的发展态势

第三节发展思路与发展方向

一、谱学分析传感器的关键科学问题

二、谱学分析传感器的发展总体思路和发展目标

第四节资助机制与政策建议

参考文献

第四章基于微纳机电系统的生化传感器与微流控芯片技术

第一节微纳生化传感器技术

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

第二节微流控芯片技术

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

参考文献

第五章基于微纳机电系统的医疗传感器技术

第一节植入式神经电极传感技术

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

第二节中医脉诊与针灸针传感微系统

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

参考文献

第六章前沿微纳机电系统技术

第一节基于单芯片单面的微纳加工技术

一、概述

二、发展现状与发展态势 169

三、发展思路与发展方向 175

四、资助机制与政策建议 176

第二节应用于汽车自动驾驶技术的微纳传感器

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

第三节荧光传感材料及器件

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

第四节基于金刚石材料的传感器

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

第五节基于氮化铝压电薄膜的射频FBAR

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

第六节熔融石英的微球形陀螺

一、概述

二、发展现状与发展态势

三、发展思路与发展方向

四、资助机制与政策建议

参考文献

关键词索引

彩图

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